A Robust Resonant Controller for High-Speed Scanning of Nanopositioners: Design and Implementation

This brief presents a novel damping control scheme for piezoactuated nanopositioning platforms with robust resonant control (RRC). The RRC is developed to attenuate the resonant-vibrational modes of the lightly damped dynamics of the stage in an inner positive feedback loop. The parameters in the proposed RRC are determined through an analytical approach. Indeed, the controller gains constrained by both the robustness and the damping ratio of...