Original paper

Low-Temperature Graphene Growth by Forced Convection of Plasma-Excited Radicals

Volume: 19, Issue: 2, Pages: 739 - 746
Published: Jan 7, 2019
Abstract
We developed the forced convection (FC)-PECVD method for the synthesis of graphene, in which a specially designed blowing plasma source is used at moderate gas pressure (1-10 Torr) and the distribution of reactive radicals reaching the substrate surface can be controlled by forced convection. Self-limiting growth of graphene occurs on copper foil, and monolayer graphene growth with a few defects is achieved even at low temperatures (<400 °C). We...
Paper Details
Title
Low-Temperature Graphene Growth by Forced Convection of Plasma-Excited Radicals
Published Date
Jan 7, 2019
Volume
19
Issue
2
Pages
739 - 746
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