Chemisorption and sensitivity at semiconductor sensors revisited
Abstract
In this work we derived the adsorption isotherms for non-dissociative and dissociative chemisorption of oxygen on a semiconductor surface. We extended the Wolkenstein theory for dissociative chemisorption and re-examined the basis that led to currently accepted formalisms in the literature. In particular, we correctly incorporated dissociative chemisorption as a second-order reaction. We determined band bendings and adsorbate coverages for...
Paper Details
Title
Chemisorption and sensitivity at semiconductor sensors revisited
Published Date
Apr 1, 2019
Volume
285
Pages
232 - 239
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