Thermoelastic damping in the out-of-plane vibration of a microring resonator with rectangular cross-section
Abstract
An analytical model is proposed for thermoelastic damping in the out-of-plane vibration of a microring resonator with rectangular cross-section. Although thermoelastic damping in the in-plane vibration of a ring resonator has been intensively studied, there have been few works on thermoelastic damping of microring resonators in out-of-plane mode. The main difficulty of estimating thermoelastic damping could be the coupled motion of bending and...
Paper Details
Title
Thermoelastic damping in the out-of-plane vibration of a microring resonator with rectangular cross-section
Published Date
Feb 1, 2019
Volume
151
Pages
684 - 691
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