A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

Volume: 66, Issue: 12, Pages: 9161 - 9172
Published: Dec 1, 2019
Abstract
This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in dual-stage system. To compensate the positioning error of coarse stage and achieve a large motion stroke, a symmetrical structure with an arch-shape bridge-type amplifier based on single notch circular flexure hinges is proposed and utilized in the...
Paper Details
Title
A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier
Published Date
Dec 1, 2019
Volume
66
Issue
12
Pages
9161 - 9172
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