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doi.org/10.1016/j.apsusc.2018.10.133
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Environment friendly chemical mechanical polishing of copper
Zhenyu Zhang
47
,
Junfeng Cui
18
,
...,
Dongming Guo
46
View all 6 authors
Applied Surface Science
6.30
Volume: 467-468, Pages: 5 - 11
Published
: Oct 16, 2018
271
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Paper Fields
Chemistry
Metallurgy
Materials science
Engineering
Polishing
Composite material
Chemical-mechanical planarization
Slurry
Organic chemistry
X-ray photoelectron spectroscopy
Adsorption
Surface roughness
Inorganic chemistry
Chemical engineering
Copper
Hydrogen peroxide
Paper Details
Title
Environment friendly chemical mechanical polishing of copper
DOI
doi.org/10.1016/j.apsusc.2018.10.133
Published Date
Oct 16, 2018
Journal
Applied Surface Science
Volume
467-468
Pages
5 - 11
Notes
History
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