Effects of Nitrogen Content on the Structure and Mechanical Properties of (Al0.5CrFeNiTi0.25)Nx High-Entropy Films by Reactive Sputtering

In this study, (Al0.5CrFeNiTi0.25)Nx high-entropy films are prepared by a reactive direct current (DC) magnetron sputtering at different N2 flow rates on silicon wafers. It is found that the structure of (Al0.5CrFeNiTi0.25)Nx high-entropy films is amorphous, with x = 0. It transforms from amorphous to a face-centered-cubic (FCC) structure with the increase of nitrogen content, while the bulk Al0.5CrFeNiTi0.25 counterpart prepared by casting...