Static and Dynamic Analyses of a 6-DOF Ultra-Precision Parallel Mechanism

Flexure-based ultra-precision parallel mechanisms have inherent difference between input and actual output. Lost motion that stems from elasticity of flexure hinges in the parallel mechanism results in gain reduction of actuation. Therefore, static analysis is carried out by calculating directional stiffness and lost motions of actuation units, and is verified by finite element analysis (FEA). Dynamic analysis is performed based on modal...