Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators

Volume: 28, Issue: 6, Pages: 065007 - 065007
Published: Mar 27, 2018
Abstract
No abstract.
Paper Details
Title
Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators
Published Date
Mar 27, 2018
Volume
28
Issue
6
Pages
065007 - 065007
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