Thermoelastic damping in micromechanical resonators operating as mass sensors

This paper presents an analytical study on evaluation of thermoelastic damping (TED) in micromechanical resonators operating as mass sensors by means of the thermal energy approach. Both quasi-one-dimensional model and two-dimensional model are proposed and analytical expressions of TED in infinite series form for micro-beam resonator-based mass sensors are derived. We apply the proposed models to examine effects of various factors on TED, such...