Damping controller design for nanopositioners: A hybrid reference model matching and virtual reference feedback tuning approach

Conventionally, fixed-structure feedback controllers are designed by model-based approaches. However, such controllers are not necessarily ideal and optimal when connecting with the actual plant because of the existence of modeling uncertainty. In this paper, a paralleled damping controller as well as a novel hybrid reference model matching (RMM) and virtual reference feedback tuning (VRFT) approach for parameters’ tuning of the controller is...