Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators

Volume: 111, Issue: 21, Pages: 213105 - 213105
Published: Nov 20, 2017
Abstract
Shape memory alloy (SMA) films are very attractive materials for microactuators because of their high energy density. However, all currently developed SMA actuators utilize martensitic transformation activated by periodically generated heating and cooling; therefore, they have a slow actuation speed, just a few Hz, which restricts their use in most of the nanotechnology applications such as high frequency microcantilever based physical and...
Paper Details
Title
Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators
Published Date
Nov 20, 2017
Volume
111
Issue
21
Pages
213105 - 213105
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