Data Driven Controller Design for Positioning Control of an AFM Scanner

In this paper, a data driven controller is designed for the positioning control of a piezoelectric tube scanner (PTS) used in an atomic force microscope (AFM). A single-input single-output (SISO) model-based data driven controller is synthesized by using a mixed negative imaginary (NI) and small gain (SG) approach. The controller is implemented on an AFM and gives significant damping and tracking performance, with 16.64 dB and 19.33 dB damping...