Nonlinear dynamic responses of electrostatically actuated microcantilevers containing internal fluid flow

A nonlinear theoretical model for electrostatically actuated microcantilevers containing internal fluid flow is developed in the present study, which takes into account the geometric and electrostatic nonlinearities. A four-degree-of-freedom and eight-dimensional analytical modeling is presented for investigating the stability mechanism and nonlinear dynamic responses near and away from the instability boundaries of the fluid-loaded cantilevered...