Positive acceleration, velocity and position feedback based damping control approach for piezo-actuated nanopositioning stages

This paper proposes a new damping control approach with positive acceleration, velocity and position feedback (PAVPF) scheme for piezo-actuated nanopositioning stages to implement high-bandwidth operation. To achieve this objective, the intrinsic hysteresis nonlinearity of the piezoelectric actuator is firstly handled by a feedforward compensator with a modified Prandtl–Ishlinskii model. Afterwards, the PAVPF controller with the pole-placement...