Positive acceleration, velocity and position feedback based damping control approach for piezo-actuated nanopositioning stages
Abstract
This paper proposes a new damping control approach with positive acceleration, velocity and position feedback (PAVPF) scheme for piezo-actuated nanopositioning stages to implement high-bandwidth operation. To achieve this objective, the intrinsic hysteresis nonlinearity of the piezoelectric actuator is firstly handled by a feedforward compensator with a modified Prandtl–Ishlinskii model. Afterwards, the PAVPF controller with the pole-placement...
Paper Details
Title
Positive acceleration, velocity and position feedback based damping control approach for piezo-actuated nanopositioning stages
Published Date
Nov 1, 2017
Journal
Volume
47
Pages
97 - 104
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