Data-based double-feedforward controller design for a coupled parallel piezo nanopositioning stage

Vibrations as well as cross-coupling effects severely hinder fast and accurate tracking for coupled parallel piezo nanopositioning stages. In this article, a data-based double-feedforward controller is proposed to reduce individual-axis repetitive errors and cross-coupling-caused errors simultaneously. The proposed approach utilizes modeling-free inversion-based iterative control to compensate repetitive errors and data-based feedforward...