Micromechanics of substrate-supported thin films
Abstract
The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial...
Paper Details
Title
Micromechanics of substrate-supported thin films
Published Date
Sep 14, 2017
Journal
Volume
34
Issue
2
Pages
381 - 391
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History