Parametric resonance of a repulsive force MEMS electrostatic mirror
Abstract
We investigate the nonlinear dynamic behavior of an electrostatic MEMS mirror. The MEMS mirror is driven by repulsive force actuators, which avoid pull-in instability and enable large travel ranges. In parallel-plate actuators, the force on the structure is toward the substrate limiting the range of motion to the capacitor gap. Unlike parallel-plate, repulsive force actuators push the mirror away from the substrate not limiting the motion. The...
Paper Details
Title
Parametric resonance of a repulsive force MEMS electrostatic mirror
Published Date
Oct 1, 2017
Volume
265
Pages
20 - 31
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