Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

Residual stress in thin films and coatings strongly affects their properties and behavior in service. Comprehensive understanding and precise measurements of residual stress are prerequisites for preparing high quality films and coatings. Residual stresses in TiN films with different thickness were measured by X-ray diffraction (XRD) employing the cos2α sin2ψ method with certain optimization. Grazing incidence parallel beam optics was combined...