Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings
Abstract
Titanium nitride (TiN) coatings were synthesized by plasma-enhanced magnetron sputtering (PEMS) on 316L austenitic stainless steel and YG8 cemented carbide substrates. The plasma enhancement process involved the use of hot filaments as additional sources of electrons for the magnetron discharge. The structural, morphology, crystallinity, thickness, abrasion resistance and adhesion of the TiN coatings, as well as the nanohardness and Young's...
Paper Details
Title
Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings
Published Date
Nov 1, 2017
Volume
725
Pages
877 - 883
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