Micropatterning of metal oxide nanofibers by electrohydrodynamic (EHD) printing towards highly integrated and multiplexed gas sensor applications

Integration of heterogeneous sensing materials in microelectronic devices is essential to accomplish compact and highly integrated environmental sensors. For this purpose, a micro-patterning method of electrospun metal oxide nanofibers based on electrohydrodynamic (EHD) printing process was developed in this work. Several types of metal oxide (SnO2, In2O3, WO3 and NiO) nanofibers that were produced by electrospinning, fragmented into smaller...