On the Nonlinear Dynamics of a Doubly Clamped Microbeam Near Primary Resonance

This work aims to investigate theoretically and experimentally various nonlinear dynamic behaviors of a doubly clamped microbeam near its primary resonance. Mainly, we investigate the transition behavior from hardening, mixed, and then softening behavior. We show in a single frequency–response curve, under a constant voltage load, the transition from hardening to softening behavior demonstrating the dominance of the quadratic electrostatic...