Original paper

Self-Aligned Multichannel Graphene Nanoribbon Transistor Arrays Fabricated at Wafer Scale

Volume: 16, Issue: 9, Pages: 5378 - 5385
Published: Aug 19, 2016
Abstract
We present a novel method for fabricating large-area field-effect transistors (FETs) based on densely packed multichannel graphene nanoribbon (GNR) arrays using advanced direct self-assembly (DSA) nanolithography. The design of our strategy focused on the efficient integration of the FET channel and using fab-compatible processes such as thermal annealing and chemical vapor deposition. We achieved linearly stacked DSA nanopattern arrays with...
Paper Details
Title
Self-Aligned Multichannel Graphene Nanoribbon Transistor Arrays Fabricated at Wafer Scale
Published Date
Aug 19, 2016
Volume
16
Issue
9
Pages
5378 - 5385
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