Electrochromic Response Time of MoO_3 film Fabricated by Reactive Sputtering
Abstract
Molybdenum oxide thin films have been prepared by dc reactive magnetron sputtering from a metallic Mo target in an Ar+O2 mixed atmosphere.The electrochromic(EC) properties of the films are studied with different deposition pressure in the deposition process.The MoO3 films are characterized with x-ray diffraction(XRD),atomic force microscopy(AFM) and Fourier transform infrared(FT-IR) spectroscopy.The electrochromic properties of the samples are...
Paper Details
Title
Electrochromic Response Time of MoO_3 film Fabricated by Reactive Sputtering
Published Date
Jan 1, 2011
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