MEMS Based Optomechanical Infrared Imaging

IR imaging using uncooled IR camera has received intensive interests because of its advantages of cost, weight, and reliability over cooled electro-optic camera. Recently, uncooled thermo-mechanical IR camera has been developed into a potential low-cost and yet high-resolution instrument for various applications. In this paper, a new type IR detector with an optical readout system is developed. The IR detector contains a focus plane array (FPA)...