Ti–Si–C–N Based Nanocomposite Coatings Produced by Plasma Enhanced Magnetron Sputter Deposition and its Erosion Resistance
Abstract
This paper presents a plasma enhanced magnetron sputtering (PEMS) technology, by which Ti–Si–C–N nanocomposite coatings are systematically studied. The PEMS principle is first discussed. Then the paper describes the tisicn coating preparation process. These coatings were studied using various techniques including SEM, XRD, EDS nanoindentation, microindentation, and erosion testing. The coatings are found to be nanocomposite coatings composed of...
Paper Details
Title
Ti–Si–C–N Based Nanocomposite Coatings Produced by Plasma Enhanced Magnetron Sputter Deposition and its Erosion Resistance
Published Date
Jan 1, 2009
Journal
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