Impact of surface and residual stresses and electro-/magnetostatic axial loading on the suspended nanomechanical based mass sensors: A theoretical study

Suspended nanomechanical mass sensors are capable to detect the attached molecules or particles through the shifts in the resonant frequencies. However, surface and residual stresses can as well cause a shift of the sensor resonances. As result, understanding the impact of stresses in an accuracy and sensitivity of the mass sensors is a fundamental requirement for a rigorous analysis of experimental data. Here, we present a detailed theoretical...