Effect of Annealing Temperature on the Low Emissivity of TiO<sub>2</sub>/Ag/TiO<sub>2</sub> Films

Volume: 28, Issue: 3, Pages: 134 - 138
Published: May 31, 2015
Abstract
Ag intermediated TiO_2/TEX> films were deposited by RF and DC magnetron sputtering and then vacuum annealed at 100, 200 and 300^{\circ}C/TEX> for 30 minutes to investigate the effect of annealing temperature on the structural and optical properties of the films. For all depositions, the thickness of the TiO_2/TEX> and Ag films were kept constant at 24 and 15 nm by controlling the deposition time. As-deposited...
Paper Details
Title
Effect of Annealing Temperature on the Low Emissivity of TiO<sub>2</sub>/Ag/TiO<sub>2</sub> Films
Published Date
May 31, 2015
Volume
28
Issue
3
Pages
134 - 138
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