Ammonia modification of oxide-free Si(111) surfaces
Abstract
Amination of surfaces is useful in a variety of fields, ranging from device manufacturing to biological applications. Previous studies of ammonia reaction on silicon surfaces have concentrated on vapor phase rather than wet chemical processes, and mostly on clean Si surfaces. In this work, the interaction of liquid and vapor-phase ammonia is examined on three types of oxide-free surfaces – passivated by hydrogen, fluorine (1/3 monolayer) or...
Paper Details
Title
Ammonia modification of oxide-free Si(111) surfaces
Published Date
Aug 1, 2016
Journal
Volume
650
Pages
285 - 294
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