Studies on the surface modification of TiN coatings using MEVVA ion implantation with selected metallic species

Improvement in the performance of TiN coatings can be achieved using surface modification techniques such as ion implantation. In the present study, physical vapor deposited (PVD) TiN coatings were implanted with Cr, Zr, Nb, Mo and W using the metal evaporation vacuum arc (MEVVA) technique at a constant nominal dose of 4 × 1016 ions cm−2 for all species. The samples were characterized before and after implantation, using Rutherford...