Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms
Abstract
Piezoelectric stack-actuated parallel-kinematic nanopositioning platforms are widely used in nanopositioning applications. These platforms have a dominant first resonant mode at relatively low frequencies, typically in the hundreds of hertz. Furthermore, piezoelectric stacks used for actuation have inherent nonlinearities such as hysteresis and creep. These problems result in a typically low-grade positioning performance. Closed-loop control...
Paper Details
Title
Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms
Published Date
Jan 1, 2008
Volume
7
Issue
1
Pages
79 - 90
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