Morphology changes of Si(0 0 1) surfaces during wet chemical halogenation

This paper reports an experimental study aimed to develop a suitable and reliable procedure to graft organic molecular fragments onto silicon surfaces, leading to a stable organic termination. Grafting of self-assembled organic films on the (0 0 1) surface of Si is performed by SC1/SC2 processing and by a bromination step preceding the nucleophilic reaction with the organic aromatic compound. After each wet processing step the Si(0 0 1)...