Experimental studies on polymer deformation and flow in micro hot embossing

In large area micro hot embossing, the process temperature plays a critical role to both the local fidelity of micro structure formation and global uniformity. The significance of low temperature hot embossing is to improve global flatness of embossed devices. This paper reports on experimental studies of polymer deformation and flow modes in micro embossing when the process temperatures are below or near its glass transition temperature (Tg)....