A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner

Volume: 18, Issue: 3, Pages: 1113 - 1121
Published: Jun 1, 2013
Abstract
This paper presents a novel piezoelectric strain sensor for damping and accurate tracking control of a high-speed nanopositioning stage. Piezoelectric sensors have the benefit of simple interface circuitry, low cost, high sensitivity, and high bandwidth. Although piezoelectric sensors have been successfully used as vibration sensors in smart structures, complications arise when they are used in a feedback loop for tracking. As piezoelectric...
Paper Details
Title
A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner
Published Date
Jun 1, 2013
Volume
18
Issue
3
Pages
1113 - 1121
Citation AnalysisPro
  • Scinapse’s Top 10 Citation Journals & Affiliations graph reveals the quality and authenticity of citations received by a paper.
  • Discover whether citations have been inflated due to self-citations, or if citations include institutional bias.