Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner

The development of a high-performance three-axis serial-kinematic nanopositioning stage is presented. The stage is designed for high-bandwidth applications that include video-rate scanning probe microscopy and high-throughput probe-based nanofabrication. Specifically, the positioner employs vertically stiff, double-hinged serial flexures for guiding the motion of the sample platform to minimize parasitic motion (runout) and off-axis effects...