Toughness measurement and toughening mechanisms of arc ion plating Cr2O3 films treated by annealing

Chromium sesquioxide (Cr2O3) films were deposited on Ni-based high-temperature alloy substrates by an arc ion plating technique and then annealed at different temperatures and heating rates. The influence of annealing conditions on the toughness of Cr2O3 films was calculated according to spherical indentation tests. The increase in grain size and compressive stress, variety of microstructure and surface morphology, and atom diffusion that...