Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation

Volume: 18, Issue: 5, Pages: 1459 - 1471
Published: Oct 1, 2013
Abstract
In this paper, a general skeleton on modeling, controller design, and applications of the piezoelectric positioning stages is presented. Toward this framework, a general model is first proposed to characterize dynamic behaviors of the stage, including frequency response of the stage, voltage-charge hysteresis and nonlinear electric behavior. To illustrate the validity of the proposed general model, a dynamic backlash-like model is adopted as one...
Paper Details
Title
Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation
Published Date
Oct 1, 2013
Volume
18
Issue
5
Pages
1459 - 1471
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