Development of a peristaltic gas micropump with a single chamber and multiple electrodes

Volume: 23, Issue: 9, Pages: 095006
Published: Sep 1, 2013
Abstract
This paper reports on the development of a multi-electrode electrostatically driven peristaltic gas micropump. The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteristic operating frequency of the micropump increases as the number of electrodes increases. The flow rate is also observed to increase to maximum...
Paper Details
Title
Development of a peristaltic gas micropump with a single chamber and multiple electrodes
Published Date
Sep 1, 2013
Volume
23
Issue
9
Pages
095006
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