High bandwidth multi-variable combined resonant and integral resonant controller for fast image scanning of atomic force microscope

This paper presents the design and implementation of a multi-variable combined resonant and integral resonant controller for the piezoelectric tube scanner (PTS) of an atomic force microscope (AFM) to damp the resonant mode of the scanner, reduce the cross coupling effect between the axes of the scanner, increase the bandwidth of the overall closed-loop system, and improve the high speed imaging performance of the AFM. The lateral and...