Functionalization of oxide-free silicon surfaces
Abstract
Much of the microelectronic industry and many uses of silicon are based on the stability of silicon oxide and the electrical quality of its interface with the silicon substrate. It is natural therefore to have focused on functionalizing silicon by grafting molecules on its oxide. However, severe issues are associated with organic functionalization of silicon oxide, such as reproducibility in grafting the layers and quality and stability of these...
Paper Details
Title
Functionalization of oxide-free silicon surfaces
Published Date
Sep 1, 2013
Volume
31
Issue
5
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