A MIMO Double Resonant Controller Design for Nanopositioners
Abstract
A design of a double resonant controller to enhance the high-speed nanopositioning performance of a piezoelectric tube scanner (PTS) is presented in this paper. The design of the controller is demonstrated using a multi-input multi-output framework for damping, tracking, and cross coupling control in the PTS. A reference model control technique is applied to design the controller. The controller proposed in this paper achieves a bandwidth near...
Paper Details
Title
A MIMO Double Resonant Controller Design for Nanopositioners
Published Date
Mar 1, 2015
Volume
14
Issue
2
Pages
224 - 237
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