Delayed feedback controller for microelectromechanical systems resonators undergoing large motion

In this paper, we study the effect of a delayed feedback controller on stabilizing microelectromechanical systems (MEMS) resonators when undergoing large amplitude motion. A delayed feedback velocity controller is implemented through modifying the parallel plate electrostatic force used to excite the resonator into motion. A nonlinear single-degree-of-freedom model is used to simulate the resonator response. Long-time integration is used. Then,...