Minimax LQG controller design for nanopositioners
Published: Jun 1, 2014
Abstract
A design and experimental implementation of a minimax linear-quadratic-Gaussian (LQG) controller to damp the resonant modes of a piezoelectric tube scanner (PTS) used in most commercial atomic force microscopes is presented in this paper. The controller design is presented to account two uncertainties in the system which arises due to (a) the spill over dynamics of the PTS at high frequencies and (b) changes in resonance frequency of the scanner...
Paper Details
Title
Minimax LQG controller design for nanopositioners
Published Date
Jun 1, 2014
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