Two-degrees-of-freedom controller delivering zero-error tracking of ramp-like trajectories for nanopositioning systems

Piezoelectrically actuated nanopositioning systems (tube or platform type) are widely employed in applications where fine mechanical displacements with resolution down to atomic scale are required. This paper presents the design, analysis, and validation of a new control scheme based on the structure of the traditional Two-Degrees-of-Freedom (2DOF) PID controller. The proposed controller is established based on a linear continuous input-output...