T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications

A T-shape suspended silicon nitride racetrack ring resonator sitting on a silicon dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction with the surrounded environment while maintaining a high quality factor. The resonator consists of a directional coupler with a waveguide width of 1.3 μm and a ring structure with curve radius of 20 μm. More than 1.6 × 104 quality factor at a...