Multi-variable velocity feedback controller for piezoelectric tube scanner: A “mixed” negative-imaginary and small-gain approach

CCC 2013
Pages: 5287 - 5292
Published: Jul 26, 2013
Abstract
This paper presents the design and implementation of a multi-input multi-output (MIMO) velocity feedback controller (VFC) based on a recent theoretical results on “mixed” negative-imaginary and small-gain approach to damp the first resonant mode of a piezoelectric tube scanner (PTS) used in atomic force microscopes (AFMs). The identification of the MIMO dynamics of the PTS is done by using the measured data and the “mixed” negative-imaginary and...
Paper Details
Title
Multi-variable velocity feedback controller for piezoelectric tube scanner: A “mixed” negative-imaginary and small-gain approach
Published Date
Jul 26, 2013
Journal
Pages
5287 - 5292
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