Cristiane Regina Stilhano Vilas Boas
MESA+ Institute for Nanotechnology
Analytical chemistryIonChemical physicsX-ray photoelectron spectroscopyMaterials scienceSputteringScale (ratio)OxideOxygen diffusionOxygen transportIsotope exchangeIon beamOxygenTungstenNanometre
Publications 3
#1Cristiane Regina Stilhano Vilas Boas (MESA+ Institute for Nanotechnology)H-Index: 1
#2Jacobus Marinus Sturm (MESA+ Institute for Nanotechnology)H-Index: 15
Last. Fred Bijkerk (MESA+ Institute for Nanotechnology)H-Index: 16
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Abstract null null In this work we analyze the oxidation of 30 nm polycrystalline transition metals films (Hf, Ta, Mo and Ru) at low temperatures (298 K to 473 K) upon the exposure to two different species: molecular oxygen and atomic oxygen. Using in-situ spectroscopic ellipsometry and in-vacuum X-ray photoelectron spectroscopy, we verify the oxide growth kinetics and the final stoichiometry after each exposure condition for the four metals, and explore the particularities present in each oxide...
#1Parikshit Phadke (MESA+ Institute for Nanotechnology)H-Index: 5
#2Cristiane Regina Stilhano Vilas Boas (MESA+ Institute for Nanotechnology)H-Index: 1
Last. F. Bijkerk (MESA+ Institute for Nanotechnology)H-Index: 4
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Abstract Transition metals used in semiconductor, photolithography and fusion applications interact with low energy oxygen ions. Understanding erosion, the nature of the formed oxide and depth of oxygen transport is necessary in mitigating unexpected performance of sensors, optics or plasma facing components. Oxide formation is governed by both the ion–target combination and the incident ion energy. We study the interaction of the transition metals molybdenum, ruthenium, palladium and tungsten, ...
Last. Frederik BijkerkH-Index: 10
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