Mark A. Shannon
University of Illinois at Urbana–Champaign
Analytical chemistryElectrical engineeringOpticsEngineeringFluidicsFabricationComposite materialNanotechnologyElectrodeChemistryMaterials sciencePower densityMicroelectromechanical systemsMembraneChemical engineeringOptoelectronicsHydrogenSiliconMicrochannelMicrofluidics
238Publications
45H-index
15.3kCitations
Publications 236
Newest
#1Kuan-Lun ChuH-Index: 5
#2Mark A. ShannonH-Index: 45
Last. Richard I. MaselH-Index: 70
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Source
#1Vikhram V. Swaminathan (UIUC: University of Illinois at Urbana–Champaign)H-Index: 9
#2Mark A. Shannon (UIUC: University of Illinois at Urbana–Champaign)H-Index: 45
Last. Rashid Bashir (UIUC: University of Illinois at Urbana–Champaign)H-Index: 79
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Dielectrophoretic separation of particles finds a va- riety of applications in the capture of species such as cells, viruses, proteins, DNA from biological systems, as well as other organic and inorganic contaminants from water. The ability to capture particles is constrained by poor volumetric scaling of separation force with respect to particle diameter, as well as the weak penetration of electric fields in the media. In order to improve the separation of sub-micron colloids, we present a sche...
Source
#1Yaozhong Zhang (MSU: Michigan State University)H-Index: 12
#2Jea Hyeoung Han (UIUC: University of Illinois at Urbana–Champaign)H-Index: 1
Last. Junghoon Yeom (MSU: Michigan State University)H-Index: 21
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Dry film photoresists (DF PRs) are widely used to perform photolithography on non-traditional substrates such as printing circuit boards, plastic sheets, or non-planar surfaces. Commercially available DF PRs are usually in a negative tone and rather thick, limiting lithographic resolution and versatility. The relatively large pressure required for lamination also prevents the technology from being used for delicate substrates. Here we present a modified soft-lithographic process, namely photores...
Source
#1Huan Hu (UIUC: University of Illinois at Urbana–Champaign)H-Index: 10
#2Vikhram V. Swaminathan (UIUC: University of Illinois at Urbana–Champaign)H-Index: 9
Last. Likun Zhu (IUPUI: Indiana University – Purdue University Indianapolis)H-Index: 17
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This paper reports a new type of hierarchically structured surface consisting of re-entrant silicon micropillars with silicon nanowires atop for superhydrophobic surface with extremely low hysteresis. Re-entrant microstructures were fabricated on a silicon substrate through a customized one-mask microfabrication process while silicon nanopillars were created on the entire surface of microstructures, including sidewalls, by a metal-assisted-chemical etching process. The strategy of constructing h...
Source
#1Damena Agonafer (Stanford University)H-Index: 13
#2Muhammed Enes Oruc (UIUC: University of Illinois at Urbana–Champaign)H-Index: 8
Last. Mark A. Shannon (UIUC: University of Illinois at Urbana–Champaign)H-Index: 45
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Ionic transport through synthetic nanoporous membranes has received great attention in applications related to biosensing, fuel cell, and desalination. Past work has demonstrated that charge selectivity can be achieved by applying a potential across a metallized conductive membrane. However, challenges arise for improving charge selectivity as a result of irreversibility of the system from the anion adsorption at the membrane surface. This study demonstrates how charge selectivity can be improve...
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#1Richard C. Sustich (UIUC: University of Illinois at Urbana–Champaign)H-Index: 2
#2Mark A. Shannon (UIUC: University of Illinois at Urbana–Champaign)H-Index: 45
Last. Brian Pianfetti (UIUC: University of Illinois at Urbana–Champaign)H-Index: 1
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Source
#1Huan Hu (UIUC: University of Illinois at Urbana–Champaign)H-Index: 10
#2Parsian K. Mohseni (UIUC: University of Illinois at Urbana–Champaign)H-Index: 20
Last. William P. KingH-Index: 68
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The authors report fabrication of arbitrary shapes of silicon and silicon oxide nanostructures using tip-based nanofabrication (TBN). A heated atomic force microscope (AFM) tip deposits molten polymer on a substrate to form polymer nanostructures that serve as etch mask to fabricate silicon or silicon oxide nanostructures. The authors demonstrate how TBN can be combined with conventional wet etching as well as metal-assisted chemical etching, in order to fabricate these nanostructures. The size ...
Source
#1Ki Sung Lee (UIUC: University of Illinois at Urbana–Champaign)H-Index: 4
#2Bonghwan Kim (DCU: Catholic University of Daegu)H-Index: 12
Last. Mark A. Shannon (UIUC: University of Illinois at Urbana–Champaign)H-Index: 45
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This paper reports on the development of a multi-electrode electrostatically driven peristaltic gas micropump. The micropump consists of a single chamber and a flexible diaphragm with a multi-electrode pattern. The single-chamber design is divided into smaller cells by the electrodes; the characteristic operating frequency of the micropump increases as the number of electrodes increases. The flow rate is also observed to increase to maximum before decreasing for larger numbers of electrodes. Whe...
Source
#1Bonghwan Kim (DCU: Catholic University of Daegu)H-Index: 12
#2Ki Sung Lee (UIUC: University of Illinois at Urbana–Champaign)H-Index: 4
Last. Mark A. Shannon (UIUC: University of Illinois at Urbana–Champaign)H-Index: 45
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A double-sided peristaltic micropump driven by electrostatic actuation has been developed for pumping gases through microsystems, such as a micro-gas chromatography system. The pump was operated from 60 to 160 V. The maximum flow rate of 389 µl/min was achieved at 100 V and 4 Hz with an estimated power consumption of 26 µW/sccm. In order to increase the flow rate, a double-sided chamber design was used. The micropump had two single-sided silicon chambers and a membrane in the middle of the pump ...
Source
#1Bonghwan KimH-Index: 12
#2Kisung LeeH-Index: 124
Last. Mark A. ShannonH-Index: 45
view all 3 authors...
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